MEMS
Micro-Electro-Mechanical Systems, or MEMS, are micro-structures created using semiconductor fabrication processes. MEMS devices are widely used in consumer, communication, and computer applications. They include gyroscopes, accelerometers, inertial measurement units, pressure sensors, inertial sensors, RF devices, microphones, micro-bolometers, and inkjet heads. VEM is working with many of the leading MEMS suppliers and foundries for both process and packaging solutions.